Product Category menu

Category background


Product Detail Information

 The InLine Express™ (IX) is a low cost handling platform for one or two parallel process modules.  Each process module is isolated from atmosphere by a small load lock with an integrated transfer robot.  These ExpressLocks™ mate to the field-proven FabExpress™ atmospheric front end.

The InLine Express is available in two levels of integration:  fully wired, with or without system level software.  The IX handles 200mm and 300mm round wafers.